Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143953 | Protection of photomasks from 193nm radiation damage using thin coatings of ALD Al2O3 | Robert L. Sandstrom, Peter H. Bartlau, Supratik Guha, Edward W. Kiewra, Louis M. Kindt +1 more | 2021-10-12 |