Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143953 | Protection of photomasks from 193nm radiation damage using thin coatings of ALD Al2O3 | Peter H. Bartlau, Thomas B. Faure, Supratik Guha, Edward W. Kiewra, Louis M. Kindt +1 more | 2021-10-12 |
RS
Robert L. Sandstrom
Overall (2021): #281,830 of 548,734Top 55%
1
Patents 2021