Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143953 | Protection of photomasks from 193nm radiation damage using thin coatings of ALD Al2O3 | Robert L. Sandstrom, Peter H. Bartlau, Thomas B. Faure, Supratik Guha, Edward W. Kiewra +1 more | 2021-10-12 |