Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187983 | EUV patterning of monolayers for selective atomic layer deposition | Rudy J. Wojtecki, Ekmini Anuja De Silva, Noah Frederick Fine Nathel | 2021-11-30 |
| 11171054 | Selective deposition with SAM for fully aligned via | Son V. Nguyen, Rudy J. Wojtecki, Alexander Edward Hess, Thomas J. Haigh, Jr., Cornelius Brown Peethala +1 more | 2021-11-09 |