Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069775 | Sacrificial layer for channel surface retention and inner spacer formation in stacked-channel FETS | Josephine B. Chang, Michael A. Guillorn, Xin Miao | 2021-07-20 |
| 11004678 | Atomic layer deposition sealing integration for nanosheet complementary metal oxide semiconductor with replacement spacer | Bruce B. Doris, Michael A. Guillorn, Xin Miao | 2021-05-11 |
| 11004933 | Field effect transistor structures | Josephine B. Chang, Bruce B. Doris, Michael A. Guillorn, Xin Miao | 2021-05-11 |