Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195701 | Showerhead | Akira Mikumo, Shigenobu SAKITA | 2021-12-07 |
| 11127605 | Wafer holder | Akira Mikumo | 2021-09-21 |
| 10886157 | Wafer holding unit | Shigenobu SAKITA, Kenji Shinma, Daisuke Shimao, Katsuhiro Itakura, Masuhiro Natsuhara +1 more | 2021-01-05 |