Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195701 | Showerhead | Koichi Kimura, Akira Mikumo | 2021-12-07 |
| 10886157 | Wafer holding unit | Koichi Kimura, Kenji Shinma, Daisuke Shimao, Katsuhiro Itakura, Masuhiro Natsuhara +1 more | 2021-01-05 |