Wafer holding unit

Assignee

• Sumitomo Electric Industries

Inventors

• Koichi Kimura (225 patents)
• Shigenobu SAKITA (5 patents)
• Kenji Shinma (9 patents)
• Daisuke Shimao (7 patents)
• Katsuhiro Itakura (11 patents)
• Masuhiro Natsuhara (53 patents)
• Akira Mikumo (15 patents)

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