Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11066744 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tatsuya Yotsutani, Takashi Ozaki | 2021-07-20 |
| 11041240 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kosuke Takagi, Risa YAMAKOSHI, Atsushi Hirano | 2021-06-22 |