Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11066744 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Hideki Horita, Takashi Ozaki | 2021-07-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11066744 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Hideki Horita, Takashi Ozaki | 2021-07-20 |