Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11041240 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kosuke Takagi, Hideki Horita, Atsushi Hirano | 2021-06-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11041240 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kosuke Takagi, Hideki Horita, Atsushi Hirano | 2021-06-22 |