Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139198 | High resistivity semiconductor-on-insulator wafer and a method of manufacturing | Igor Peidous, Lu Fei, Jeffrey L. Libbert, Andrew M. Jones, Alex Usenko +2 more | 2021-10-05 |
| 11085112 | Susceptor with ring to limit backside deposition | Mark Hawkins, Matthew G. Goodman | 2021-08-10 |
| 11081386 | High resistivity SOI wafers and a method of manufacturing thereof | Igor Peidous, Srikanth Kommu, Gang Wang | 2021-08-03 |
| 11015245 | Gas-phase reactor and system having exhaust plenum and components thereof | Eric Hill | 2021-05-25 |
| 10907251 | Liner assemblies for substrate processing systems | Arash Abedijaberi | 2021-02-02 |
| 10910257 | High resistivity SOI wafers and a method of manufacturing thereof | Igor Peidous, Srikanth Kommu, Gang Wang | 2021-02-02 |