Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053585 | Reactor system for sublimation of pre-clean byproducts and method thereof | John Tolle | 2021-07-06 |
| 11015245 | Gas-phase reactor and system having exhaust plenum and components thereof | Shawn George Thomas | 2021-05-25 |
| 11018047 | Hybrid lift pin | Uday Kiran Rokkam | 2021-05-25 |