Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11168395 | Temperature-controlled flange and reactor system including same | Sonti Sreeram, Joe Margetis, Junwei Su | 2021-11-09 |
| 11053585 | Reactor system for sublimation of pre-clean byproducts and method thereof | Eric Hill | 2021-07-06 |
| 11018002 | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures | Joe Margetis | 2021-05-25 |
| 11004977 | Method for depositing a group IV semiconductor and related semiconductor device structures | Joe Margetis | 2021-05-11 |