Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043784 | Laser apparatus and EUV light generation system | Tsukasa HORI, Takayuki Yabu, Yoshiaki Kurosawa | 2021-06-22 |
| 10955751 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Yuta Takashima | 2021-03-23 |