Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043784 | Laser apparatus and EUV light generation system | Tsukasa HORI, Yoshifumi Ueno, Takayuki Yabu | 2021-06-22 |
| 10897118 | Laser apparatus and extreme ultraviolet light generating system | — | 2021-01-19 |