Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043784 | Laser apparatus and EUV light generation system | Tsukasa HORI, Yoshifumi Ueno, Yoshiaki Kurosawa | 2021-06-22 |
| 10908429 | Extreme ultraviolet light generation system, laser beam size controlling method, and electronic device manufacturing method | Yuichi Nishimura | 2021-02-02 |