Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11207715 | System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays | Christina Ann Rathman, Alan D. Rose | 2021-12-28 |
| 10991610 | Systems and methods for treating substrates with cryogenic fluid mixtures | Chimaobi W. Mbanaso | 2021-04-27 |