Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11207715 | System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays | Jeffery W. Butterbaugh, Christina Ann Rathman | 2021-12-28 |