Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11020774 | Microelectronic treatment system having treatment spray with controllable beam size | — | 2021-06-01 |
| 10991610 | Systems and methods for treating substrates with cryogenic fluid mixtures | Jeffery W. Butterbaugh | 2021-04-27 |