| 11179823 |
Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane |
Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Masahiko Kishimoto +1 more |
2021-11-23 |
| 11088011 |
Elastic membrane, substrate holding device, and polishing apparatus |
Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more |
2021-08-10 |
| D918161 |
Elastic membrane |
Shingo Togashi, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Tomoko Owada +1 more |
2021-05-04 |
| 10991613 |
Substrate holding apparatus, substrate suction determination method, substrate polishing apparatus, substrate polishing method, method of removing liquid from upper surface of wafer to be polished, elastic film for pressing wafer against polishing pad, substrate release method, and constant amount gas supply apparatus |
Osamu Nabeya, Makoto Fukushima |
2021-04-27 |
| D913977 |
Elastic membrane for semiconductor wafer polishing |
Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more |
2021-03-23 |