Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11179823 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Shingo Togashi, Satoru Yamaki, Masahiko Kishimoto +1 more | 2021-11-23 |
| 11088011 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Makoto Fukushima, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2021-08-10 |
| D918161 | Elastic membrane | Shingo Togashi, Makoto Fukushima, Osamu Nabeya, Satoru Yamaki, Tomoko Owada +1 more | 2021-05-04 |
| D913977 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2021-03-23 |