Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11179823 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Keisuke Namiki, Shingo Togashi, Satoru Yamaki, Masahiko Kishimoto +1 more | 2021-11-23 |
| 11088011 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2021-08-10 |
| D918161 | Elastic membrane | Shingo Togashi, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki, Tomoko Owada +1 more | 2021-05-04 |
| 10991613 | Substrate holding apparatus, substrate suction determination method, substrate polishing apparatus, substrate polishing method, method of removing liquid from upper surface of wafer to be polished, elastic film for pressing wafer against polishing pad, substrate release method, and constant amount gas supply apparatus | Osamu Nabeya, Satoru Yamaki | 2021-04-27 |
| D913977 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2021-03-23 |