Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192216 | Polishing method and polishing apparatus | Hiromitsu Watanabe, Kuniaki Yamaguchi, Yutaka Wada | 2021-12-07 |
| 11069563 | Method for processing substrate and substrate processing apparatus | Atsuo Katagiri | 2021-07-20 |