Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069563 | Method for processing substrate and substrate processing apparatus | Itsuki Kobata | 2021-07-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069563 | Method for processing substrate and substrate processing apparatus | Itsuki Kobata | 2021-07-20 |