Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192216 | Polishing method and polishing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Yutaka Wada | 2021-12-07 |
| 11141832 | Water discharge system, water discharge method, water discharge control apparatus, water discharge control method, substrate processing apparatus and non-transitory computer readable medium recording water discharge control | — | 2021-10-12 |