Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170970 | Methods and devices for examining an electrically charged specimen surface | Michael Schnell, Bernd Schindler, Markus Boese | 2021-11-09 |
| 11150552 | Method and apparatus for analyzing a defective location of a photolithographic mask | Ralf Schönberger | 2021-10-19 |
| 10983075 | Device and method for analysing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Christof Baur, Klaus Edinger, Thorsten Hofmann | 2021-04-20 |