Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054439 | Scanning probe microscope and method for increasing a scan speed of a scanning probe microscope in the step-in scan mode | — | 2021-07-06 |
| 10983075 | Device and method for analysing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Klaus Edinger, Thorsten Hofmann, Michael Budach | 2021-04-20 |