Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983075 | Device and method for analysing a defect of a photolithographic mask or of a wafer | Christof Baur, Klaus Edinger, Thorsten Hofmann, Michael Budach | 2021-04-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983075 | Device and method for analysing a defect of a photolithographic mask or of a wafer | Christof Baur, Klaus Edinger, Thorsten Hofmann, Michael Budach | 2021-04-20 |