Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10988635 | Composition and method for copper barrier CMP | Fernando HUNG LOW, Roman A. Ivanov, Steven Grumbine | 2021-04-27 |
| 10968366 | Composition and method for metal CMP | Fernando HUNG LOW, Daniel Clingerman, Roman A. Ivanov, Steven Grumbine | 2021-04-06 |