Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Composition and method for copper barrier CMP

Composition and method for copper barrier CMP

US Patent 10988635 · Granted Apr 27, 2021

Estimated economic value: $53,046,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Composition and method for polishing boron doped polysilicon2025
Composition and method for silicon nitride CMP2025
Composition and method for silicon nitride CMP2025
Composition and method for silicon nitride CMP2025
Alternative oxidizing agents for cobalt CMP2023
Silica-based slurry for selective polishing of carbon-based films2023
CMP composition including a novel abrasive2023
CMP composition including a novel abrasive2023
Derivatized polyamino acids2022
Polishing composition and method utilizing abrasive particles treated with an am2021
Composition and method for metal CMP2021
Composition and method for metal CMP2021