Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11034862 | Polishing composition and method utilizing abrasive particles treated with an aminosilane | Shoutian Li, William Ward, Pankaj Kumar Singh, Jeffrey Dysard | 2021-06-15 |
| 10988635 | Composition and method for copper barrier CMP | Steven Kraft, Fernando HUNG LOW, Roman A. Ivanov | 2021-04-27 |
| 10968366 | Composition and method for metal CMP | Steven Kraft, Fernando HUNG LOW, Daniel Clingerman, Roman A. Ivanov | 2021-04-06 |