Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10984994 | Deposition apparatus and physical vapor deposition chamber | Jun Zhang, Boyu DONG, Jinrong Zhao, Xuewei Wu, Bingliang GUO +4 more | 2021-04-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10984994 | Deposition apparatus and physical vapor deposition chamber | Jun Zhang, Boyu DONG, Jinrong Zhao, Xuewei Wu, Bingliang GUO +4 more | 2021-04-20 |