Andreas Klipp — 2 Patents at Basf Se

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #	Title	Co-Inventors	Date
11180719	Use of compositions comprising a siloxane-type additive for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below	Daniel LOEFFLER, Mei Chin SHEN, Sheng-Hsuan Wei, Frank Oliver Heinrich Pirrung, Lothar Alexander Engelbrecht +3 more	2021-11-23
11168239	Chemical-mechanical polishing composition comprising benzotriazole derivatives as corrosion inhibitors	Robert REICHARDT, Martin Kaller, Michael Lauter, Yuzhuo Li	2021-11-09