Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062874 | Apparatus using multiple charged particle beams | Weiming Ren, Xuedong Liu, Xuerang Hu | 2021-07-13 |
| 10892138 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Weiming Ren, Xuedong Liu, Xuerang Hu | 2021-01-12 |