Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062874 | Apparatus using multiple charged particle beams | Weiming Ren, Xuedong Liu, Zhong-Wei Chen | 2021-07-13 |
| 11062877 | Apparatus of plural charged-particle beams | Shuai Li, Weiming Ren, Xuedong Liu, Juying Dou, Zhongwei Chen | 2021-07-13 |
| 10892138 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Weiming Ren, Xuedong Liu, Zhong-Wei Chen | 2021-01-12 |