Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107657 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Zhongwei Chen | 2021-08-31 |
| 11062874 | Apparatus using multiple charged particle beams | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2021-07-13 |
| 11062877 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Juying Dou, Xuerang Hu, Zhongwei Chen | 2021-07-13 |
| 11043354 | Apparatus of plural charged-particle beams | Xuedong Liu, Shuai Li, Zhongwei Chen | 2021-06-22 |
| 10892138 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2021-01-12 |