Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11072622 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2021-07-27 |
| 11047042 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Tiina McKee, Mikko Ritala, Markku Leskelä | 2021-06-29 |
| 11047046 | Vapor deposition of thin films comprising gold | Maarit Mäkelä, Mikko Ritala, Markku Leskelä | 2021-06-29 |
| 11014866 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Miika Mattinen, Mikko Ritala, Markku Leskelä | 2021-05-25 |
| 10941487 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2021-03-09 |