Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11014866 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2021-05-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11014866 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2021-05-25 |