Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11121014 | Dummy wafer storage cassette | Chris G. M. de Ridder, Adriaan Garssen | 2021-09-14 |
| 11087997 | Substrate processing apparatus for processing substrates | Chris G. M. de Ridder | 2021-08-10 |
| 11024523 | Substrate processing apparatus and method | — | 2021-06-01 |