Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11121014 | Dummy wafer storage cassette | Theodorus G.M. Oosterlaken, Adriaan Garssen | 2021-09-14 |
| 11087997 | Substrate processing apparatus for processing substrates | Theodorus G.M. Oosterlaken | 2021-08-10 |
| 11049751 | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith | — | 2021-06-29 |
| 10954597 | Atomic layer deposition apparatus | Lucian Jdira, Bert Jongbloed, Jeroen A. Smeltink | 2021-03-23 |
| 10900122 | Apparatus for semiconductor wafer processing | John Kevin Shugrue, Lucian Jdira | 2021-01-26 |