Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139191 | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith | Edwin den Hartog-Besselink | 2021-10-05 |
| 11127617 | Storage device for storing wafer cassettes for use with a batch furnace | — | 2021-09-21 |
| 11121014 | Dummy wafer storage cassette | Chris G. M. de Ridder, Theodorus G.M. Oosterlaken | 2021-09-14 |