Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11013096 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, David Robert Evans, Jack Michael Gazza | 2021-05-18 |
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Skip to contentShowing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11013096 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, David Robert Evans, Jack Michael Gazza | 2021-05-18 |