Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11013096 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Mathew Abraham, David Robert Evans, Jack Michael Gazza | 2021-05-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11013096 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Mathew Abraham, David Robert Evans, Jack Michael Gazza | 2021-05-18 |