Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11009801 | Dynamic cooling control for thermal stabilization for lithography system | Benjamin M. Johnston, David Michael CORRIVEAU, Jae Myung YOO, WeiMin Tao, Antoine P. Manens | 2021-05-18 | $51,490,000 |
| 10901328 | Method for fast loading substrates in a flat panel tool | Benjamin M. Johnston, Preston Fung, Sean Screws, Jae Myung YOO | 2021-01-26 | $35,448,000 |