Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009801 | Dynamic cooling control for thermal stabilization for lithography system | David Michael CORRIVEAU, Cheuk Ming LEE, Jae Myung YOO, WeiMin Tao, Antoine P. Manens | 2021-05-18 |
| 10901328 | Method for fast loading substrates in a flat panel tool | Preston Fung, Sean Screws, Cheuk Ming LEE, Jae Myung YOO | 2021-01-26 |