Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009801 | Dynamic cooling control for thermal stabilization for lithography system | Benjamin M. Johnston, David Michael CORRIVEAU, Cheuk Ming LEE, Jae Myung YOO, WeiMin Tao | 2021-05-18 |