Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10994389 | Polishing apparatus using neural network for monitoring | Kun Xu, Hassan G. Iravani, Denis Ivanov, Boguslaw A. Swedek, Shih-Haur Shen +1 more | 2021-05-04 |
| 10969773 | Machine learning systems for monitoring of semiconductor processing | Graham Yennie | 2021-04-06 |