Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209804 | Intelligent processing tools | — | 2021-12-28 |
| 11114350 | Method for removing photoresist from photomask substrate | Khalid Makhamreh, Eli DAGAN | 2021-09-07 |
| 11054746 | Portion of layer removal at substrate edge | Eli DAGAN | 2021-07-06 |
| 10962889 | Method and apparatus for high throughput photomask curing | Eli DAGAN, Khalid Makhamreh, Bruce J. Fender | 2021-03-30 |
| 10933624 | Photomask pellicle glue residue removal | Eli DAGAN | 2021-03-02 |
| 10928724 | Attachment feature removal from photomask in extreme ultraviolet lithography application | Eli DAGAN, Khalid Makhamreh, Bruce J. Fender | 2021-02-23 |