Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062906 | Silicon implantation in substrates and provision of silicon precursor compositions therefor | Ying Tang, Joseph D. Sweeney, Tianniu Chen, James J. Mayer, Richard S. Ray +2 more | 2021-07-13 |